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Director of Technology | Silfex, a division of Lam Research

John Chen

John Chen is Director of Technology at Silfex, a division of Lam research where he leads R&D team developing new materials and manufacturing processes to make silicon parts for dielectric etch chambers.  Prior to joining Silfex, John was a senior crystal growth engineer and field applications manager at MEMC Inc where he developed both continuous Cz and directional solidification processes to grow large size silicon ingots for solar cells. Prior to joining MEMC Inc, John was a senior crystal growth engineer at II-VI Inc where he developed physical vapor transport process to grow silicon carbide boules for power electronics and RF electronics. Prior to Joining II-VI Inc, John was a post doc fellow at the University of Cincinnati, Nanoelectronics Lab, where he grew SiC epi-film and studied its electrical properties. John Chen has 30 years of experience in silicon and silicon carbide crystal growth, their electronics applications and their interactions with plasmas.  

John Chen obtained PhD in Chemistry from University of Missouri-Columbia in 1996 and BS in Electronics from Beijing University in 1988.