Michael Heuken

Prof. Dr. Michael Heuken, born on November 17, 1961, received the Diplom Ingenieur degree/Dr. Ing. degree in Electrical Engineering from Duisburg University in 1985/1989, joined the Institut für Halbleitertechnik/RWTH Aachen as senior engineer and has been working in the field of metalorganic vapor phase epitaxy for electronic and optoelectronic devices. In 1994 he finished his Habilitation in semiconductor technology and devices with a thesis on MOCVD technology for optoelectronic devices. Since then he has been lecturer for semiconductor technology and devices as well as circuits for communication systems at RWTH. In 1997 he joined AIXTRON SE in Aachen/Germany, is now Vice President Advanced Technologies. In 1999 he was honored as Professor at RWTH Aachen. His main experience is in the fields of semiconductor growth by MOVPE, Nanotechnology, electronic and optoelectronic devices and circuits. Prof. Heuken is author/co-author of more than 650 publications in international journals and several invited papers at international conferences. He acts as referee for international journals, has been granted several patents in the field of semiconductor technology.